Determination of Young'S Modulus and Yield Strength of Porous Low-K Dielectric Films by Nanoindentation Under Complete Consideration OfSubstrate Influence

By: Material type: ArticleArticleDescription: 64-85 pSubject(s): In: International Journal of Surface Science and Engineering
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Articles Articles Periodical Section Vol.03, No.01-02 (Jan. 2009) Available

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