Determination of Young'S Modulus and Yield Strength of Porous Low-K Dielectric Films by Nanoindentation Under Complete Consideration OfSubstrate Influence (Record no. 734856)
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| 000 -LEADER | |
|---|---|
| fixed length control field | 00684nab a2200157Ia 4500 |
| 008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION | |
| fixed length control field | 230808s2009 |||||||f |||| 00| 0 eng d |
| 100 ## - MAIN ENTRY--PERSONAL NAME | |
| Personal name | Herrmann, M |
| 9 (RLIN) | 756634 |
| 100 ## - MAIN ENTRY--PERSONAL NAME | |
| Personal name | Richter, F. |
| 9 (RLIN) | 756635 |
| 245 #0 - TITLE STATEMENT | |
| Title | Determination of Young'S Modulus and Yield Strength of Porous Low-K Dielectric Films by Nanoindentation Under Complete Consideration OfSubstrate Influence |
| 300 ## - PHYSICAL DESCRIPTION | |
| Extent | 64-85 p. |
| 650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical term or geographic name entry element | Young'S Modulus and Yield Strength of Porous Low-K Dielectric Films |
| 9 (RLIN) | 756636 |
| 650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical term or geographic name entry element | Complete Consideration OfSubstrate Influence |
| 9 (RLIN) | 756637 |
| 650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical term or geographic name entry element | Indentation |
| 9 (RLIN) | 756199 |
| 773 ## - HOST ITEM ENTRY | |
| Place, publisher, and date of publication | 2009 |
| Title | International Journal of Surface Science and Engineering |
| International Standard Serial Number | 1749785X |
| 942 ## - ADDED ENTRY ELEMENTS (KOHA) | |
| Koha item type | Articles |
| -- | 51 |
| -- | ABUL KALAM Library |
| Not for loan | Home library | Serial Enumeration / chronology | Total Checkouts | Date last seen | Koha item type |
|---|---|---|---|---|---|
| Engr Abul Kalam Library | Vol.03, No.01-02 (Jan. 2009) | 19/08/2023 | Articles |