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Determination of Young'S Modulus and Yield Strength of Porous Low-K Dielectric Films by Nanoindentation Under Complete Consideration OfSubstrate Influence

Herrmann, M Richter, F.

Determination of Young'S Modulus and Yield Strength of Porous Low-K Dielectric Films by Nanoindentation Under Complete Consideration OfSubstrate Influence - 64-85 p.

Subjects--Topical Terms:
Young'S Modulus and Yield Strength of Porous Low-K Dielectric Films
Complete Consideration OfSubstrate Influence
Indentation

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