Effect of Oxidation Pressure onCharacteristics of Fluorinated Thin Gate Oxides Prepared By Room Temperature Deposition Followed By Rapid Thermal Oxidation (Record no. 800908)
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| 000 -LEADER | |
|---|---|
| fixed length control field | 00675nab a2200169Ia 4500 |
| 008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION | |
| fixed length control field | 230808s1998 |||||||f |||| 00| 0 eng d |
| 100 ## - MAIN ENTRY--PERSONAL NAME | |
| Personal name | Yeh, Kuo-Lang |
| 9 (RLIN) | 859764 |
| 100 ## - MAIN ENTRY--PERSONAL NAME | |
| Personal name | Jeng, Ming-Jer |
| 9 (RLIN) | 776302 |
| 100 ## - MAIN ENTRY--PERSONAL NAME | |
| Personal name | Hwu, Jenn-Gwo |
| 9 (RLIN) | 776300 |
| 245 #0 - TITLE STATEMENT | |
| Title | Effect of Oxidation Pressure onCharacteristics of Fluorinated Thin Gate Oxides Prepared By Room Temperature Deposition Followed By Rapid Thermal Oxidation |
| 300 ## - PHYSICAL DESCRIPTION | |
| Extent | 539-545 p. |
| 650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical term or geographic name entry element | Liquid Phase Deposition |
| 9 (RLIN) | 701039 |
| 650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical term or geographic name entry element | Rapid Thermal Oxidation |
| 9 (RLIN) | 859765 |
| 650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical term or geographic name entry element | Oxide Breakdown Field |
| 9 (RLIN) | 859766 |
| 773 ## - HOST ITEM ENTRY | |
| Place, publisher, and date of publication | 1998 |
| Title | Proceedings ofNational Science Council, Republic of China |
| International Standard Serial Number | 02556588 |
| 942 ## - ADDED ENTRY ELEMENTS (KOHA) | |
| Koha item type | Articles |
| -- | 51 |
| -- | ABUL KALAM Library |
| Not for loan | Home library | Serial Enumeration / chronology | Total Checkouts | Date last seen | Koha item type |
|---|---|---|---|---|---|
| Engr Abul Kalam Library | Vol.22, No.04 (Jul. 1998) | 20/08/2023 | Articles |