Oxynitridation Using Radical-Oxygen and -Nitrogen for High-Performance and Highly Reliable N/P Fets

By: Material type: ArticleArticleDescription: 1761-1767 pSubject(s): In: Ieee Transactions on Electron Devices
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Item type Current library Call number Vol info Status Date due Barcode
Articles Articles Periodical Section Vol.49, No.10 (Oct. 2002) Available

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