Oxynitridation Using Radical-Oxygen and -Nitrogen for High-Performance and Highly Reliable N/P Fets
togo, M Watanabe, K
Oxynitridation Using Radical-Oxygen and -Nitrogen for High-Performance and Highly Reliable N/P Fets - 1761-1767 p.
Silicon Devices
Oxynitridation Using Radical-Oxygen and -Nitrogen for High-Performance and Highly Reliable N/P Fets - 1761-1767 p.
Silicon Devices