Rf, Dc, and Reliability Characteristics of Ald Hfo2-Al2o3 Laminate Mim Capacitors for Si Rf Ic Applications

By: Material type: ArticleArticleDescription: 886-894 pSubject(s): In: Ieee Transactions on Electron Devices
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Articles Articles Periodical Section Vol.51, No.06 (Jun. 2004) Available

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