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MicroLithography Process Technology for Ic Fabrication
Material type:
TextLanguage: English Publication details: New York : McGraw-Hill, c1986Description: XIX, 378 pISBN: - 0070193045
- 621.38173 ELL
| Item type | Current library | Shelving location | Call number | Status | Date due | Barcode |
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Lending Collection
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Circulation Section | Circulation Section | 621.38173 ELL | Available | 49506 |