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MicroLithography Process Technology for Ic Fabrication

Elliott, David J.

MicroLithography Process Technology for Ic Fabrication - New York : McGraw-Hill, c1986 - XIX, 378 p.

ISBN: 0070193045

ISSN:

Subjects--Topical Terms:
Integrated Circuits Very Large Scale Integration Design and Construction
Photoresists

Dewey Class. No.: 621.38173 / ELL

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