Impact of Recess-Etchin-Assisting Resist-Openings onShapes of Gate Grooves for Short Gate Lengrh Inaias/Ingaas Heterojunction Fet'S (Record no. 744381)

MARC details
000 -LEADER
fixed length control field 00594nab a2200169Ia 4500
008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION
fixed length control field 230808s1999 |||||||f |||| 00| 0 eng d
100 ## - MAIN ENTRY--PERSONAL NAME
Personal name Xu, Dong
9 (RLIN) 438591
100 ## - MAIN ENTRY--PERSONAL NAME
Personal name Enoki, Takatomo
9 (RLIN) 777020
100 ## - MAIN ENTRY--PERSONAL NAME
Personal name IshII, Yasunobu
9 (RLIN) 778540
245 #0 - TITLE STATEMENT
Title Impact of Recess-Etchin-Assisting Resist-Openings onShapes of Gate Grooves for Short Gate Lengrh Inaias/Ingaas Heterojunction Fet'S
300 ## - PHYSICAL DESCRIPTION
Extent 833-839 p.
650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM
Topical term or geographic name entry element Electrochemical Process
9 (RLIN) 754278
650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM
Topical term or geographic name entry element Etching
9 (RLIN) 731814
650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM
Topical term or geographic name entry element Modfets
773 ## - HOST ITEM ENTRY
Place, publisher, and date of publication 1999
Title IEEE Transactions on Electron Devices
International Standard Serial Number 00189383
942 ## - ADDED ENTRY ELEMENTS (KOHA)
Koha item type Articles
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Not for loan Home library Serial Enumeration / chronology Total Checkouts Date last seen Koha item type
  Engr Abul Kalam Library Vol.46, No.05 (May. 1999)   19/08/2023 Articles
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