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Impact of Recess-Etchin-Assisting Resist-Openings onShapes of Gate Grooves for Short Gate Lengrh Inaias/Ingaas Heterojunction Fet'S

Xu, Dong Enoki, Takatomo IshII, Yasunobu

Impact of Recess-Etchin-Assisting Resist-Openings onShapes of Gate Grooves for Short Gate Lengrh Inaias/Ingaas Heterojunction Fet'S - 833-839 p.

Subjects--Topical Terms:
Electrochemical Process
Etching
Modfets

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