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Lsser Thermal Processing of Amphous Silicon Gates to Reduce Poly-Depletion in Cmos Devices

Chong, Yung Fu Gossmann, Hans-Joachim

Lsser Thermal Processing of Amphous Silicon Gates to Reduce Poly-Depletion in Cmos Devices - 669-676 p.

Subjects--Topical Terms:
Boron Penetration
Gate Oxide

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