000 | 00675nab a2200169Ia 4500 | ||
---|---|---|---|
008 | 230808s1998 |||||||f |||| 00| 0 eng d | ||
100 |
_aYeh, Kuo-Lang _9859764 |
||
100 |
_aJeng, Ming-Jer _9776302 |
||
100 |
_aHwu, Jenn-Gwo _9776300 |
||
245 | 0 | _aEffect of Oxidation Pressure onCharacteristics of Fluorinated Thin Gate Oxides Prepared By Room Temperature Deposition Followed By Rapid Thermal Oxidation | |
300 | _a539-545 p. | ||
650 |
_aLiquid Phase Deposition _9701039 |
||
650 |
_aRapid Thermal Oxidation _9859765 |
||
650 |
_aOxide Breakdown Field _9859766 |
||
773 |
_d1998 _tProceedings ofNational Science Council, Republic of China _x02556588 |
||
942 |
_cART _o51 _pABUL KALAM Library |
||
999 |
_c800908 _d800908 |