000 00675nab a2200169Ia 4500
008 230808s1998 |||||||f |||| 00| 0 eng d
100 _aYeh, Kuo-Lang
_9859764
100 _aJeng, Ming-Jer
_9776302
100 _aHwu, Jenn-Gwo
_9776300
245 0 _aEffect of Oxidation Pressure onCharacteristics of Fluorinated Thin Gate Oxides Prepared By Room Temperature Deposition Followed By Rapid Thermal Oxidation
300 _a539-545 p.
650 _aLiquid Phase Deposition
_9701039
650 _aRapid Thermal Oxidation
_9859765
650 _aOxide Breakdown Field
_9859766
773 _d1998
_tProceedings ofNational Science Council, Republic of China
_x02556588
942 _cART
_o51
_pABUL KALAM Library
999 _c800908
_d800908