| 000 | 00531nab a2200145Ia 4500 | ||
|---|---|---|---|
| 008 | 230808s1998 |||||||f |||| 00| 0 eng d | ||
| 100 |
_aMasato, Ikegawa _9852761 |
||
| 100 |
_aJun'Ichi, Kobayashi _9852763 |
||
| 100 |
_aMorihisa, Maruko _9852765 |
||
| 245 | 0 | _aStudy onDeposition Profile Characterstics InMicron-Scale Trench Using Direct Simulation Monticarlo Method | |
| 300 | _a296-302 p. | ||
| 650 |
_aMonte Cario Methods _9755606 |
||
| 773 |
_d1998 _tTransactions ofAsme, Journal of Fluids Engineering _x00982202 |
||
| 942 |
_cART _o51 _pABUL KALAM Library |
||
| 999 |
_c794138 _d794138 |
||