| 000 | 00440nab a2200145Ia 4500 | ||
|---|---|---|---|
| 008 | 230808s2002 |||||||f |||| 00| 0 eng d | ||
| 100 |
_aShue, L _9819622 |
||
| 100 |
_aWu, Y _9162641 |
||
| 245 | 0 | _aNano/Giga Systems | |
| 300 | _a05-07 p. | ||
| 650 |
_aFree Cad for Mems _9819624 |
||
| 650 |
_aInternational Technology Roadmap for Semiconductors _9819625 |
||
| 773 |
_d2002 _tIeee Circuits and Devices Magazine _x87553996 |
||
| 942 |
_cART _o51 _pABUL KALAM Library |
||
| 999 |
_c770852 _d770852 |
||