| 000 | 00448nab a2200121Ia 4500 | ||
|---|---|---|---|
| 008 | 230808s2002 |||||||f |||| 00| 0 eng d | ||
| 100 |
_aLiao, H. E _9814663 |
||
| 245 | 2 | _aA Comprehensive Study of Indium Implantation-Induced Damage Indeep Submicrometer Nmosfet: Device Characterization and Damage Assessment | |
| 300 | _a2254-2262 p. | ||
| 650 | _aSilicon Devices | ||
| 773 |
_d2002 _tIeee Transactions on Electron Devices _x00189383 |
||
| 942 |
_cART _o51 _pABUL KALAM Library |
||
| 999 |
_c766700 _d766700 |
||