| 000 | 00375nab a2200121Ia 4500 | ||
|---|---|---|---|
| 008 | 230808s2003 |||||||f |||| 00| 0 eng d | ||
| 100 |
_aKlenov, D.O. _9811388 |
||
| 245 | 0 | _aComposition Control of Radio-Frequency Magnetron Sputter-Deposited Thin Film | |
| 300 | _a188-194 p. | ||
| 650 | _aFrequency | ||
| 773 |
_d2003 _tJournal of Materials Research _x08842914 |
||
| 942 |
_cART _o51 _pABUL KALAM Library |
||
| 999 |
_c763891 _d763891 |
||