000 | 00509nab a2200145Ia 4500 | ||
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008 | 230808s2004 |||||||f |||| 00| 0 eng d | ||
100 |
_aDing, Shi-Jin _9807532 |
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100 |
_aHu, Hang _9722447 |
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245 | 0 | _aRf, Dc, and Reliability Characteristics of Ald Hfo2-Al2o3 Laminate Mim Capacitors for Si Rf Ic Applications | |
300 | _a886-894 p. | ||
650 |
_aAutomic Layer Deposit _9807533 |
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650 |
_aRadio Frequency _990505 |
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773 |
_d2004 _tIeee Transactions on Electron Devices _x00189383 |
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942 |
_cART _o51 _pABUL KALAM Library |
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999 |
_c760780 _d760780 |