000 00509nab a2200145Ia 4500
008 230808s2004 |||||||f |||| 00| 0 eng d
100 _aDing, Shi-Jin
_9807532
100 _aHu, Hang
_9722447
245 0 _aRf, Dc, and Reliability Characteristics of Ald Hfo2-Al2o3 Laminate Mim Capacitors for Si Rf Ic Applications
300 _a886-894 p.
650 _aAutomic Layer Deposit
_9807533
650 _aRadio Frequency
_990505
773 _d2004
_tIeee Transactions on Electron Devices
_x00189383
942 _cART
_o51
_pABUL KALAM Library
999 _c760780
_d760780