| 000 | 00503nab a2200145Ia 4500 | ||
|---|---|---|---|
| 008 | 230808s2003 |||||||f |||| 00| 0 eng d | ||
| 100 |
_aTsang, C F _9806736 |
||
| 100 |
_aSu, Y J _9806737 |
||
| 245 | 0 | _aStudy and Improvement of Electrical Performance of 130 Nm Cu/Cvd Low K Sioch Interconnect Related to Via Etch Procedd | |
| 300 | _a1051-1058 p. | ||
| 650 |
_aFailure Analysis _9173017 |
||
| 650 |
_aCopper Interconnects _9806739 |
||
| 773 |
_d2003 _tMicroelectronics Journal _x00262692 |
||
| 942 |
_cART _o51 _pABUL KALAM Library |
||
| 999 |
_c760174 _d760174 |
||