000			00538nab a2200145Ia 4500
008			230808s2004 |||||||f |||| 00| 0 eng d
100			_aHsieh, Ming-Chun _9800734
100			_aFang, Yean-Kuen _9800735
245		0	_aDesign and Fabrication of Deepsubmicron Cmos Technology Compatible Suspended High-Q Spiral Inductors
300			_a324-331 p.
650			_aComplementary Metal-Oxide - Seimiconductor (Cmos) _9800737
650			_aQuality Factor _9165939
773			_d2004 _tIeee Transactions on Electron Devices _x00189383
942			_cART _o51 _pABUL KALAM Library
999			_c755970 _d755970