000			00501nab a2200157Ia 4500
008			230808s1991 |||||||f |||| 00| 0 eng d
100			_aMozumder, Purnendu K.
100			_aStrojwas, andrzej J. _9141764
245		0	_aStatistical Control of Vlsi Fabrication Processes
300			_a467-475 p.
650			_aStatistical Analysis _9112546
650			_aVlsi
650			_aFabrication
773			_d1991 _tIEEE Transactions on Components Hybrids and Manufacturing Technology _x01486411
942			_cART _o51 _pABUL KALAM Library
999			_c749192 _d749192