000 00569nab a2200157Ia 4500
008 230808s1997 |||||||f |||| 00| 0 eng d
100 _aLumpp, Janet K.
_9782378
100 _aAlien, Susan D.
_9782379
245 0 _aExcimer Laser Machining and Metalilzation of Vias in Aluminum Nitride
300 _a241-246 p.
650 _aAblation Zone
_9782380
650 _aAin
_9782381
650 _aExcimer Laser Annealing
_9780646
773 _d1997
_tIEEE Transactions on Components, Packaging, and Manufacturing Technology Part-B: Advanced Packaging
_x10709894
942 _cART
_o51
_pABUL KALAM Library
999 _c746059
_d746059