000 | 00569nab a2200157Ia 4500 | ||
---|---|---|---|
008 | 230808s1997 |||||||f |||| 00| 0 eng d | ||
100 |
_aLumpp, Janet K. _9782378 |
||
100 |
_aAlien, Susan D. _9782379 |
||
245 | 0 | _aExcimer Laser Machining and Metalilzation of Vias in Aluminum Nitride | |
300 | _a241-246 p. | ||
650 |
_aAblation Zone _9782380 |
||
650 |
_aAin _9782381 |
||
650 |
_aExcimer Laser Annealing _9780646 |
||
773 |
_d1997 _tIEEE Transactions on Components, Packaging, and Manufacturing Technology Part-B: Advanced Packaging _x10709894 |
||
942 |
_cART _o51 _pABUL KALAM Library |
||
999 |
_c746059 _d746059 |