000 00486nab a2200157Ia 4500
008 230808s1998 |||||||f |||| 00| 0 eng d
100 _aThakur, R. P. S.
_9779637
100 _aDeboer, S. J.
_9779639
100 _aJesse, C. A.
_9779640
245 0 _aProcess Simplification in Dram Manufacturing
300 _a609-619 p.
650 _aProcess Simulation
_9692937
650 _aManufactureing
_9695269
773 _d1998
_tIEEE Transactions on Electron Devices
_x00189383
942 _cART
_o51
_pABUL KALAM Library
999 _c744855
_d744855