| 000 | 00521nab a2200157Ia 4500 | ||
|---|---|---|---|
| 008 | 230808s1998 |||||||f |||| 00| 0 eng d | ||
| 100 |
_aKao, Chyuan-Haur _9777750 |
||
| 100 |
_aLai, Chao-Sung _9777752 |
||
| 100 |
_aLee, Chung-Len _9777754 |
||
| 245 | 4 | _aThe Teos Oxide Deposited on Phosphorus in Doped Polysilicon with Rapid Thermal Annealing In | |
| 300 | _a1927-1933 p. | ||
| 650 |
_aPhosphorus _9163470 |
||
| 650 |
_aTeos _9777756 |
||
| 773 |
_d1998 _tIEEE Transactions on Electron Devices _x00189383 |
||
| 942 |
_cART _o51 _pABUL KALAM Library |
||
| 999 |
_c744063 _d744063 |
||