| 000 | 00548nab a2200169Ia 4500 | ||
|---|---|---|---|
| 008 | 230808s2007 |||||||f |||| 00| 0 eng d | ||
| 100 |
_aShao, L _9765177 |
||
| 100 |
_aPalaniapan, M _9765178 |
||
| 100 |
_aKhine, Y. Y _9765180 |
||
| 245 | 0 | _aMicromechanical Resonators with Submicron Capacitive Gaps in 2 ?M Process | |
| 300 | _a1427-1427 p. | ||
| 650 |
_aIntegrated Circuits _9108 |
||
| 650 |
_aMicro-Mechanical Model _9765182 |
||
| 650 |
_aSub-Micron Devices _9765183 |
||
| 773 |
_d2007 _tIET:Iee: Electronics Letters _x00135194 |
||
| 942 |
_cART _o51 _pABUL KALAM Library |
||
| 999 |
_c738846 _d738846 |
||