| 000 | 00684nab a2200157Ia 4500 | ||
|---|---|---|---|
| 008 | 230808s2009 |||||||f |||| 00| 0 eng d | ||
| 100 |
_aHerrmann, M _9756634 |
||
| 100 |
_aRichter, F. _9756635 |
||
| 245 | 0 | _aDetermination of Young'S Modulus and Yield Strength of Porous Low-K Dielectric Films by Nanoindentation Under Complete Consideration OfSubstrate Influence | |
| 300 | _a64-85 p. | ||
| 650 |
_aYoung'S Modulus and Yield Strength of Porous Low-K Dielectric Films _9756636 |
||
| 650 |
_aComplete Consideration OfSubstrate Influence _9756637 |
||
| 650 |
_aIndentation _9756199 |
||
| 773 |
_d2009 _tInternational Journal of Surface Science and Engineering _x1749785X |
||
| 942 |
_cART _o51 _pABUL KALAM Library |
||
| 999 |
_c734856 _d734856 |
||