000 00683nam a2200205Ia 4500
008 021016s2002||||xx |||||||||||||| ||eng||
020 _a0849312620
022 _l0-8493-1262-0
041 _aeng
082 _a621.381
_bLYS
100 _aLysherski, Sergey Edward
_eAU
245 0 _aMems and Nems Systems Devices and Structures
260 _aBoca Raton :
_bCRC Press,
_cc2002
300 _a461 p.
_b: ill
440 _aNano and Microscience Engineering Technology and Medicine Series
_993393
504 _aNN
650 _aMicroelectronical System
856 _yTable of Contents
_uhttps://eaklibrary.neduet.edu.pk:8443/catalog/bk/books/toc/0-8493-1262-0.pdf
942 _cBOO
_o51
_pAbul Kalam Library
999 _c379071
_d379071