000 00802nam a2200229Ia 4500
008 070504s2006||||xx |||||||||||||| ||eng||
020 _a0471784060
022 _l0-471-78406-0
041 _aeng
082 _a621.38152
_bMAY
100 _aMay, Gary S.
_eAU
245 0 _aFundamentals of Semiconductor Manufacturing and Process Control
260 _aHoboken, Nj :
_bIeee/Wiley Interscience,
_cc2006
300 _aXIX, 463 p.
_b: ill
504 _aYY
650 _aIntegrated Circuits Design and Construction
650 _aProcess Control Statistical Methods
_945016
650 _aSemiconductors Design and Construction
_995071
700 _aSpanos, Costas J.
_eAU
856 _yTable of Contents
_uhttps://eaklibrary.neduet.edu.pk:8443/catalog/bk/books/toc/0-471-78406-0.pdf
942 _cBOO
999 _c366297
_d366297