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The Science and Engineering of Microelectronic Fabrication by
  • Campbell, Stephen A [author]
Series: The Oxford Series in Electrical and Computer Engineering
Edition: 2nd
Material type: Text Text
Language: English
Publication details: New York : Oxford University Press, c2001
Online access:
Availability: Items available for loan: Circulation Section (1)Location, call number: Circulation Section 621.38152 CAM.
Cover image
The Science and Engineering of Microelectronic Fabrication by
  • Campbell, Stephen A [author]
Series: Oxford Series in Electrical Engineering
Material type: Text Text
Language: English
Publication details: New York : Oxford University Press, c1996
Online access:
Availability: Items available for loan: Circulation Section (3)Location, call number: Circulation Section 621.38152 CAM, ...
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