Your search returned 3 results.

Results
		A Simulation Study of Long Throw Sputtering for Diffusion Barrier Deposition Into High Aspect Vias and Contacts by Smyth, T Tan, liang Chan, K Source: IEEE Transactions on Electron Devices Material type: Article; Format: print Availability: Items available for loan: Engr Abul Kalam Library (1). Request article
		A SimulatIIon Study of Long Throw Sputtering for Diffusion Barrier Deposition Into Gigh Aspect Vias and Contacts by Smy, Tom Tan, liang Broughton, James N Source: IEEE Transactions on Electron Devices Material type: Article; Format: print Availability: Items available for loan: Engr Abul Kalam Library (1). Request article
		Method for Semiconductor Process Optimization Using Functional Representations of Spatial Variations and Selectivity by Mozumder, Purnendu K Lowenstein, Lee M Source: IEEE Transactions on Components Hybrids and Manufacturing Technology Material type: Article; Format: print Availability: Items available for loan: Engr Abul Kalam Library (1). Request article

Refine your search