Earles, S Law, M Brindos, R Jones, K <br/><br/>
Nonmelt Laser Annealing of 5-Ke V and 1-Ke V Boron-Implanted Silicon 

 - 1118-1123 p. 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Boron<br/>Heavily Doped<br/>Laser Annealing