TY  - SER
AU  - Li, D
AU  - Shrivastav, G
AU  - Wang, G
AU  - Chen, Y
TI  - Accurate and Computationally Efficient Analytical 1-D Ion Implantation Models Based on Legendre Polynomials
KW  - Analytical Model
KW  - Ion Implantation
KW  - Modeling
ER  -