Li, D Shrivastav, G Wang, G Chen, Y <br/><br/>
Accurate and Computationally Efficient Analytical 1-D Ion Implantation Models Based on Legendre Polynomials 

 - 1172-1182 p. 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Analytical Model<br/>Ion Implantation<br/>Modeling