TY  - SER
AU  - togo, M
AU  - Kimura, S
AU  - Mogami, T
TI  - Recoiled-Oxygen-Free Processing  for  1.5 Nm Sion Gate-Dielectric in Sub-100-Nm Cmos Technology
KW  - Cmosfets
KW  - Dielectric Films
KW  - Ion Implantation
ER  -