Karkkainen, A.H.O. Rantala, J.T. Descour, M.R. <br/><br/>
Fabrication of Micro-Optical Structures By Applying Negative tone Hybrid Glass Materials and Greyscale Lithography 

 - 23-24 p. 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Integrated Optoelectronics<br/>Miniaturisation of Optical System