TY  - SER
AU  - Ding, Shi-Jin
AU  - Hu, Hang
TI  - Rf, Dc, and Reliability Characteristics of Ald Hfo2-Al2o3 Laminate Mim Capacitors  for  Si Rf Ic Applications
KW  - Automic Layer Deposit
KW  - Radio Frequency
ER  -