TY  - SER
AU  - Kuo, Chih-Sheng
AU  - Hsu, Jui-Feng.
TI  - High-Al2o3 Gate Dielectrics Prepared By Oxidation of Aluminium Film in Nitric Acid Followed By High-Temperature Annealing
KW  - High-K Gate Dielectric
KW  - Mos Capacitors
KW  - Nitric Acid
ER  -