Inaba, S Miyano, Shinji <br/><br/>
Sodel Fet: Novelchannel and Source/Drain Profile Engineering Schemes By Selective Si Epitaxial Growth Technology 

 - 1401-1408 p. 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Body Effects<br/>Cmos Device<br/>Epitaxial Growth Floating-Body Effect