TY  - SER
AU  - Hsieh, Ming-Chun
AU  - Fang, Yean-Kuen
TI  - Design and Fabrication of Deepsubmicron Cmos Technology Compatible Suspended High-Q Spiral Inductors
KW  - Complementary Metal-Oxide - Seimiconductor (Cmos)
KW  - Quality Factor
ER  -