Hsieh, Ming-Chun Fang, Yean-Kuen <br/><br/>
Design and Fabrication of Deepsubmicron Cmos Technology Compatible Suspended High-Q Spiral Inductors 

 - 324-331 p. 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Complementary Metal-Oxide - Seimiconductor (Cmos)<br/>Quality Factor