Mozumder, Purnendu K. Lowenstein, Lee M. <br/><br/>
Method  for  Semiconductor Process Optimization Using Functional Representations of Spatial Variations and Selectivity 

 - 311-316 p. 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Semiconductor Process Modeling<br/>Optimization  Formulation<br/>Functional Representation