TY  - SER
AU  - Kim, Sung Ki
AU  - Choi, Young Jin
AU  - Jang, Jin
TI  - Hydrogen Dilution Effect onProperties of Coplanar Amorphous Siliocn Thin-Film Transistors Fabricated by Inductively-Coupled Plasma Cvd
KW  - Amorphous Semiconductor
KW  - Hydrogen
KW  - Silicon
ER  -