Ma, Zhengxiang Becker, andrew J. Polakos, P. <br/><br/>
Rf Measyrement Technique  for  Characterizing Thin Dielectric Films 

 - 1811-1816 p. 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Capacitance Measurement<br/>Capacitors<br/>Dielectric Measurements