Lam, M. P. Pan, J. N. Mrlioch, M. R. <br/><br/>
Effects of Nitrogen Implant Activation onSic/Sio Interface of 6h-Sic Self Aligned Nmosfet'S 

 - 565-566 p. 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Mosfet<br/>Silicon Carbide