Xu, Dong Enoki, Takatomo IshII, Yasunobu <br/><br/>
Impact of Recess-Etchin-Assisting Resist-Openings onShapes of Gate Grooves  for  Short Gate Lengrh Inaias/Ingaas Heterojunction Fet'S 

 - 833-839 p. 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Electrochemical Process<br/>Etching<br/>Modfets