TY  - SER
AU  - Kao, Chyuan-Haur
AU  - Lai, Chao-Sung
AU  - Lee, Chung-Len
TI  - The Teos Oxide Deposited on Phosphorus in Doped Polysilicon with  Rapid Thermal Annealing In
KW  - Phosphorus
KW  - Teos
ER  -