Kao, Chyuan-Haur Lai, Chao-Sung Lee, Chung-Len <br/><br/>
The Teos Oxide Deposited on Phosphorus in Doped Polysilicon with  Rapid Thermal Annealing In 

 - 1927-1933 p. 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Phosphorus<br/>Teos