TY  - SER
AU  - Chen, Chih-Yao
AU  - Hwu, Jenn-GWO
AU  - Jeng, Ming-Jer
TI  - Rapid Thermal Postoxidation Anneal Engineering in Thin Gate Oxides with  Al Gates
KW  - Rapid Thermal
KW  - Anneal
KW  - Gates
ER  -