Chen, Chih-Yao Hwu, Jenn-GWO Jeng, Ming-Jer <br/><br/>
Rapid Thermal Postoxidation Anneal Engineering in Thin Gate Oxides with  Al Gates 

 - 247-253 p. 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Rapid Thermal<br/>Anneal<br/>Gates