Okulan, Nihat Henderson, H. Thurman Ahn, Chong H. <br/><br/>
A Pulsed Mode Micromachined Flow Sensor with  Temperature Drift Compensation 

 - 340-347 p. 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Fluid Flow Measurement<br/>Micromachining<br/>Semiconductor Devices